The
new fab modules provide the same rich features, ease of use
and high flexibility the SAM42 is famous for. In Addition
the new machines also provide something repeatedly requested:
SPEED!
Fab
is a completely new design, regarding software as well as
hardware. Some Highlights
- Massive
aluminum die cast base with integrated linear servos and
servo driven Z-axis
- Rugged
steel frame
- Inline
capable
- Wafer
sizes up to 12", or 2x8" in parallel
- Substrates
up to 400mm
- Digital
camera system
- Tool
changer
- Programmable
force & pressure
- Even
more simplified fully graphical application programming
- SQL-database
for product and library data
- Dual
core CPU
- Linux
2.6 operating system
The
fab modules also offer an extensive list of software and hardware
featuers.
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PDF
Datasheet (2524Kb)
