Camtek’s Falcon 500 is a series of advanced optical inspection systems for wafers before or after electrical / functional test. Designed to ensure known-good die, the Falcon 500 consistently detects visible defects that may impact die integrity or interconnect reliability.

This high-throughout system is engineered to support in-line 100% inspection at production rates.

Dedicated algorithms analyze probe marks to determine their size, proximity to pad edge and number of touch-downs. When equipped with the Camtek’s optional Confocal Chromatic Height Sensor (CCS), the Falcon 500 can even plot sampled probe mark profiles.

Proprietary optics provides high resolution and contrast. Bright and dark field illuminations bring surface irregularities out while obscuring normal process variations. Working together, the Falcon’s optics, illuminations and sophisticated algorithms provide superb detection with minimal false call rate. Intelligent and intuitive recipe setup adapts detection performance to user preferences.

The Falcon achieves outstanding utilization thanks to its off-line recipe setup and defect review. A comprehensive suit of SPC charts that reports defect distribution by die, wafer and lot levels to assist in process control and yield management.

Performance Highlights

• High throughput for 100% inspection at production rates

• New adaptive probe marks analyzing algorithm

• Superb surface defect detection

• Optional 3D measurement capabilities

• Built-in NIST-certified calibration targets ensure system accuracy

• Virtual scan for offline optimization of detection parameters

• Fast, easy and intuitive setup

• A choice of upgrade paths