| Camtek
has developed the Falcon 800 line of advanced measurement
and metrology systems for inspecting bumped wafers and ensuring
that bumps meet their tight dimensional tolerances.The CTS
– Camtek’s Triangulation System (patent-pending)
applies a novel approach to the proven triangulation principle
that improves accuracy and repeatability on a variety of bumping
technologies. Broader angular coverage creates a stronger
and more stable reflection from a wide range of bump shapes
and materials, supporting real 3D reconstruction of bump topography.
The Falcon
800 has been specifically designed for measuring even the
finest gold bumps. Selected high-grade certified mechanical
structure and assemblies provide the stability for micron-level
measurement at high speeds.
The combination of the CTS capabilities, optics and specific
algorithms enables meeting even the most demanding gold bump
applications.
Flip-Chip bumps, including solder, lead- free and copper bumps
present a wide variety of shapes and textures, which create
high dynamic spectral range and varying reflectivity. The
combination of bright field and dark field illumination images
these objects with high contrast and details that enable reliable
measurement. In addition to CTS, the Falcon 800 can be equipped
with CCS – Confocal Chromatic Sensor. This submicron
height sensor provides pinpoint precision to verify critical
height dimension, or sample gold bump surface roughness or
profile.
As a metrology
instrument, the Falcon 800 has a set of built-in NIST-certified
calibration targets that are always available for ensuring
measurement accuracy. A
comprehensive suite of SPC charts and reports supports bump
defect and dimension analysis by die, wafer, and lot levels.
Performance Highlights
- Designed
for high-speed measurement and analysis of bumped wafers
- Metrology
tools for process contro
- Validation
of bumping conformance to customer specification
- Enhanced
utilization with extensive off-line recipe setup and defect
review capabilitie
- Fast,
easy and intuitive setup
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