Inseto
Inseto

977 Wafer Cleaning Systems

977 Key Features

  • Efficient compact cleaning
  • Atomizing and High pressure cleaning
  • 200mm or 300mm basic models
  • Easy to operate with one touch activation
  • Automatic lid cover closing
  • Process monitoring with display status and alarms
  • Storage capacity of 8 programmable recipes
  • Environmentally friendly and safe to operate

The 977 Wafer Cleaner from ADT is a free standing system for cleaning workpieces after dicing.

The 977 is more than just a cleaner, thanks to its robust design and smart user interface it can be extended to perform more complex process oriented stages too.

The system is offered in two basic configurations: ADT-977 supports up to 200mm round substrates and ADT-977L supports up to 300mm substrates. A wide variety of substrate chucks and frame adaptors are available, with custom versions as required.

977 – 200 Wafer Cleaner Specifications

Max. wafer size:

Ø 200 mm

Cleaning method:

Atomizing cleaning / High pressure cleaning

Number of recipes:

8

Spinner velocity:

200–3000 rpm

Dimensions (WxDxH):

410 x 625 x 950 mm

Approx. weight:

100 kg

977 – 200 Wafer Cleaner Specifications

Max. wafer size:

Ø 300 mm

Cleaning method:

Atomizing cleaning / High pressure cleaning

Number of recipes:

8

Spinner velocity:

200–2500 rpm

Dimensions (WxDxH):

520 x 809 x 950 mm

Approx. weight:

160 kg

Further Information

Contact Us

Tel: +44 (0)1264 334505

Email: enquiries@inseto.co.uk

Applications

Cleaning Wafers, Substrates, PCB’s, Glass, Metals Parts and Ceramics Devices un-mounted or on Blue & UV Tapes, post Dicing.

Industry Segments

Semiconductor Production, University Research, Military & Aerospace, Telecommunications, Medical Electronics, Fibre Optics and Photonics, Microwave Electronics, Microelectronics, Power Semiconductor Assembly, Semiconductor Back-end Assembly, PCB Assembly Industries.

ADT Website

www.adt-co.com

Region

Available from Inseto in the United Kingdom, Ireland & Scandinavia

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