Inseto

977 Wafer Cleaning Systems

977 Key Features

  • Efficient compact cleaning
  • Atomizing and High pressure cleaning
  • 200mm or 300mm basic models
  • Easy to operate with one touch activation
  • Automatic lid cover closing
  • Process monitoring with display status and alarms
  • Storage capacity of 8 programmable recipes
  • Environmentally friendly and safe to operate

977 Wafer Cleaner:

The 977 Wafer Cleaner is free-standing system designed for after-dicing workpiece cleaning and drying.

The system is equipped with a spinning chuck table and a rotating washing/drying arm. The arm can be configured with an atomizing cleaning nozzle or a high-pressure nozzle to cope with a wide range of cleanliness requirements.

An intuitive operating interface allows the user to set the desired cleaning sequences, spinning velocity and duration, in addition to displaying process status and alarms during operation.

The system is offered in two basic configurations: ADT-977 supports up to 200mm round substrates and ADT-977L supports up to 300mm substrates.  A wide variety of substrate chucks, frame and ring adaptors are available, with custom versions as required.

977 – 200 Wafer Cleaner Specifications

Max. wafer size:

Ø 200 mm

Cleaning method:

Atomizing cleaning / High pressure cleaning

Number of recipes:

8

Spinner velocity:

200–3000 rpm

Dimensions (WxDxH):

410 x 625 x 950 mm

Approx. weight:

100 kg

977 – 200 Wafer Cleaner Specifications

Max. wafer size:

Ø 300 mm

Cleaning method:

Atomizing cleaning / High pressure cleaning

Number of recipes:

8

Spinner velocity:

200–2500 rpm

Dimensions (WxDxH):

520 x 809 x 950 mm

Approx. weight:

160 kg

Related Products

Further Information

Contact Us

Tel: +44 (0)1264 334505

Email: enquiries@inseto.co.uk

Applications

Cleaning Wafers, Substrates, PCB’s, Glass, Metals Parts and Ceramics Devices un-mounted or on Blue & UV Tapes, post Dicing.

Industry Segments

Semiconductor Production, University Research, Military & Aerospace, Telecommunications, Medical Electronics, Fibre Optics and Photonics, Microwave Electronics, Microelectronics, Power Semiconductor Assembly, Semiconductor Back-end Assembly, PCB Assembly Industries.

ADT Website

www.adt-co.com

Region

Available from Inseto in the United Kingdom, Ireland & Scandinavia

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