Lithography, Wafer Bonding & Mask Clean-Fabrication Equipment by SÜSS MicroTec
SÜSS MicroTec are the manufacturer of the world’s first mask aligner and recognised technology leader, designer and producer of process equipment for backend lithography, wafer bonding and photomask processing.
SÜSS MicroTec provides cost-effective solutions with unsurpassed quality and cutting-edge technology, enabling their customers to maximise yield at high throughput thus reducing cost of ownership.
In close cooperation with research institutes and industry partners SÜSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and Nanoimprint lithography as well as key processes for WLP, MEMS and LED manufacturing. With its global infrastructure for applications and service SÜSS MicroTec supports more than 8,000 installed systems worldwide.
Spin Coaters, Spray Coater & Developer
SUSS spin coaters, developers and spray coaters are renowned for their consistency including bench-top, free-standing to automated tools.
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Ink Jet Printer
The Pixdro range of ink-jet printers for research, development or production printing applications are now part of SUSS MicroTec.
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Mask Aligners
High-resolution lithography exposure systems providing exceptional reliability & maximum light uniformity.
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Wafer Bonders, De-Bonders & Aligners
Manual to automated permanent and non-permanent wafer bonders & de-bonders, for MEMS, SOI and advanced packaging applications.
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Photomask Equipment
Manual to fully automated mask or wafer cleaning systems and mask fabrication equipment for developing, cleaning, baking, etching etc.
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Remanufactured Equipment – SÜSS ReMan
Certified SÜSS MicroTec original equipment fully refurbished & updated to the latest safety regulations and standards.
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Further Information
Applications
Wafer and Substrate Lithography, Wafer Coating and Cleaning Processes of MicroFluidic Devices, Power Semiconductors, MEMS Devices, Compound & GaN, Photonic Components etc.
Industry Segments
Semiconductor Wafer Fabrication, University Research and Development
SÜSS MicroTec Website
Region
United Kingdom, Ireland, Sweden, Finland, Norway & Iceland
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