MJB4 Mask Aligner
MJB4 Key Features
- Compact UV mask aligner
- Process pieces (5x5mm) to wafers up to 100mm
- Ideal for laboratory, R&D and small scale production
- Soft, hard, vacuum & soft-vacuum contact modes
- Exceptional uniformity, repeat-ability & reliability
- High-resolution printing down to 0.5 microns
- LED or mercury lamp-house options
- Kit for UV-nano-imprint lithography
The compact design of the SUSS Microtec MJB4 Mask Aligner provides the perfect solution for laboratories, research environments and pilot production, with print resolutions down to 0.5 microns
Developed to provide leading levels of exposure for small substrates, pieces and wafers up to 100mm, the MJB4 provides an economical answer where high precision and resolution in the sub-micron range are required, on a reliable, stable and robust platform.
The system is designed for the processing of fragile, warped or part wafers and pieces from a few millimeters up to 100mm diameter. Precision alignment is achieved with either split or single field microscopes with an optional IR alignment system for backside features, whilst a Wedge Error Compensation (WEC) provides optimal parallelism between substrate and mask.
The patented UV250/300/400 Broadband diffraction reducing optics feature fast switching between different wavelengths. An optional LED Lamphouse with light uniformity <2.5%, is switchable for Broadband or G, H & I lines as required.
Tel: +44 (0)1264 334505
UV Lithography, Exposure and Printing of Semiconductor Wafers and other Substrates
Wafer level chip-scale packaging, flip chip packaging, bumping, MEMS, LED, power devices, optical components and compound substrates and other semiconductor related device R&D applications
SÜSS MicroTec Website
United Kingdom and Ireland