Benchtop Plasma Cleaner: PE-50XL

PE-50XL Key Features

  • Continuously adjustable power range
  • Parallel plate electrode for optimum plasma
  • PLC control with simple adjustment of stored parameters
  • Optional plasma etching 13.56MHz RF source
  • For processing up to 175mm (7″) samples

The Plasma Etch, Inc. PE-50XL has all the features as the PE-50, however it comes with a 200w x 225d x 100h mm (8″ w x 9″ d x 4″ h) chamber for those looking to process larger applications. The system features an implosion proof rectangular welded Aluminium Vacuum Chamber and a direct powered RF electrode for optimum cleaning and etching.

The PE-50XL was developed to process parts for smaller production facilities, R&D facilities and Universities. Applications include cleaning or stripping medical devices, solar cells, printed circuit boards, connectors, MEMs, nanotechnology, wafer level packaging, as well as many other related semiconductor processes.

PE-50XL features include:

  • Durable Welded Aluminium Vacuum Chamber
  • Chamber Dimensions: 200x225x100mm (8″x9″x4″)
  • Single 175x200mm RF Powered Electrode
  • 400W, 50KHz Continuously Variable Power Supply
  • 2 Rotometer Gas Control 0-25cc/min
  • Pirani Vacuum Gauge, 0-1Torr
  • PLC Microprocessor Control System
  • Keypad user interface with alphanumeric display
  • Storage of one Process Recipe
  • Automatic Process Sequencing
  • 5 CFM Oxygen Service Vacuum Pump
  • Pump footprint 175x400mm (7” x 16”)
  • Console Dimensions: 350x350x450mm (14x14x18″)
  • Approximate Shipping weight is 45Kg
  • Electrical: 230/240VAC, 14A


  • 5 CFM 2-Stage Direct Drive Oil Vacuum Pump
  • 150W, 13.56MHz Generator & Automatic Matching Network
  • Light Status Traffic Light Bar
  • Mass Flow Meter
  • PE-50-XL Benchtop Plasma Cleaner

PE-50XL Technical Downloads

Related Products

Knowledge Base Articles

Further Information

Contact Us

Tel: +44 (0)1264 334505



SEM / FIB Slide Cleaning and De-Contamination, Hydrophilic Surface Modification, Stripping Polyimide, Surface Cleaning, Surface Preparation, Removal of Hydrocarbons, Organic Materials, Oxides and Sulfides, Small Series Production etc.

Industry Segments

Research, Development, University, Academic, Medical, Plastic, Glass, Automotive, Aerospace, Military, Telecommunications, Electronics, Industrial, Photonics, Solar Cell, Nanoelectronics, Fibre Optics, Microwave, Microelectronic, Semiconductor, Printed Circuit Board.

Plasma Etch Inc. Website


United Kingdom, Ireland & Scandinavia/Nordic Regions: Finland, Sweden, Norway & Denmark, Netherlands, France & Benelux

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