Vacuum Wafer Probe Equipment

Key Features

  • Vacuum Wafer Probe Equipment
  • Test MEMS, Sensors, Switches, Microbolometers etc.
  • Easily customized to meet a variety of applications and budgets
  • Semiautomatic and fully automatic versions
  • Ideal for research through to production testing requirements
  • Test semiconductor die, partial and whole wafers to 200 mm
  • Various pumps and controls to meet a variety of vacuum levels

SemiProbe’s dual stage vacuum wafer probe equipment manufactured in either semiautomatic or fully automatic configurations, is designed to deliver high performance and accuracy testing of sensors, accelerometers, switches, microbolometers and other devices affected by the resistance of normal atmosphere, before expensive packaging.

Built using the PS4L’s patented technology, SemiProbe manufactures a range of Vacuum Probing Systems, which test wafers or substrates in a vacuum environment. Additionally, individual die and broken/partial wafers can be tested with the Vacuum Probing System. All key modules are interchangeable and upgradeable.

Configured on a vibration isolation table, the chamber contains the wafer stage, the chuck system with carrier plate and manipulators. The programmable wafer stage provides up to 205 mm x 205 mm of X, Y movement and has programmable Z and theta stages. Several thermal chuck options are available to provide temperature ranges from -65 to 300°C .

The system is ideal for research, laboratory or production applications. With a comprehensive portfolio of optional accessories and upgrades, SemiProbe’s Vacuum Wafer Probing equipment can be easily customized to meet a variety of applications and budgets, now and in the future.

Example Applications

Related Products

Knowledge Base Articles

Further Information

Contact Us

Tel: +44 (0)1264 334505



Wafer Probe Testing of MEMS, Sensors, Switches, Microbolometers, or any product that is vacuum-packaged, Vacuum Testing Semiconductor Wafers, Vacuum Wafer Probe of Silicon or IIIV Wafers etc.

Industry Segments

University Research, Development & Characterisation Test, Semiconductor Wafer Probe

SemiProbe Website


Available from Inseto in the United Kingdom, Ireland & Scandinavia

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