Wet Bench Chemistry Equipment for Semiconductor Fabrication – MOT
MOT manufactures and develops wet bench chemistry equipment for the fabrication of MEMS and semiconductor devices in the research and industrial setting. The equipment offered allows the user to choose between a range of different wet-chemical processes including electro-plating, etching, cleaning, porous silicon formation as well as other customised semiconductor applications.
The equipment solutions offered by MOT cover service, support, process optimisation and start up as well as custom engineering and process development offerings. A modular approach allows different functionalities and chemical processes to be combined into a system to offer a complete solution for your fabrication needs.
MOT was founded as a supplier of galvanic systems for the use in clean rooms, production environments and research laboratories. Deployed throughout a wide range of process technology sections in the semiconductor, microtechnology, electronics and optical industries. MOT offers complete production solutions as well as specialist designed equipment on request of their customers.
Wet Bench Plating Systems
The electroforming unit µGalv is an advanced plating system for a range of applications for both wafer and panel plating.
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Wet Bench Etching Process Tool
The etching unit µChem is a modular wet bench process tool for the standard wet chemical processes used in semiconductor fabrication.
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Porous Silicon Formation Wet Bench
The µPorSi porous silicon formation system is designed to allow the wet chemical fabrication of porous silicon substrates.
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Electrochemical Etch Stop Wet Bench
The µChem-ECES wet bench for chemical etching employs the cost effective edge stop to precisely control the etch process.
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Spin Rinse Dryer
The MOT µSRD is an advanced spin- rinse-dryer designed to clean and dry semiconductor wafers in a batch processing application.
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Further Information
Applications
Wafer and Substrate Etching, Plating, Via Fabrication, Cleaning, Porous Silicon Formation for MicroFluidic Devices, Power Semiconductors, MEMS Devices, Compound & GaN Materials, Photonic, Photovoltaic and LED Components etc.
Industry Segments
Semiconductor Wafer Fabrication, University Research and Development
MOT Mikro Website
Region
United Kingdom, Ireland, Finland, Sweden, Denmark, Estonia, Iceland & Norway
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