Manual Wafer Cleaning System

WAFER CLEANING EQUIPMENT

The 977 Wafer Cleaner from ADT is a free standing system for cleaning workpieces after dicing.

The 977 is more than just a cleaner, thanks to its robust design and smart user interface it can be extended to perform more complex process oriented stages too. The system is offered in three basic configurations: WCS-977 – round wafer up to 8", WCS-977LA – round wafer up to 12" and WCS-977D – a standalone coating/de-coating station with: wafer spin coating technology.

Features include:

  • Compact design
  • 8", 12" basic models
  • Atomized Cleaning
  • One touch activation
  • Automatic lid cover closing
  • Intuitive user interface
  • Process monitoring
  • Storage capacity of 8 programmable recipes
  • Safe to operate

ADT 977 Wafer Cleaner Specifications

977 Wafer Substrate Cleaner
Tapeless Wafer Cleaning Capability

Model 977- 200

Max. wafer size:

Ø 200 mm

Cleaning method:

Atomizing cleaning / High pressure cleaning

Number of recipes:

8

Spinner velocity:

200–3000 rpm

Dimensions (WxDxH):

410 x 625 x 950 mm

Approx. weight:

100 kg

Model 977L - 300

Max. wafer size:

Ø 300 mm

Cleaning method:

Atomizing cleaning / High pressure cleaning

Number of recipes:

8

Spinner velocity:

200–2500 rpm

Dimensions (WxDxH):

520 x 809 x 950 mm

Approx. weight:

160 kg

FURTHER INFORMATION & REQUEST FORM:

Contact Us

Tel: +44 (0)1264 334505

Email: enquiries@inseto.co.uk

Applications

Cleaning Wafers, Substrates, PCB's, Glass, Metals Parts and Ceramics Devices un-mounted or on Blue & UV Tapes, post Dicing.

Industry Segments

Semiconductor Production, University Research, Military & Aerospace, Telecommunications, Medical Electronics, Fibre Optics and Photonics, Microwave Electronics, Microelectronics, Power Semiconductor Assembly, Semiconductor Back-end Assembly, PCB Assembly Industries.

Technical Papers

ADT Website

Region

Available from Inseto in the United Kingdom, Ireland & Scandinavia

Full Name

Company

Country

Email

Message

Telephone:
+44 (0)1264 334505

Email:
enquiries@inseto.co.uk

ISO 9001 Certificate No. 12416