ATV PEO601 Fast Ramping 100mm/4"Benchtop Semiconductor Furnace

PEO-601 TABLETOP QUARTZ TUBE FURNACE

ATV's PEO-601 is a table-top quartz tube batch furnace for horizontal processing of up to 100mm (4") diameter Semiconductor Wafers or Substrates. Six powerful 1kW Heaters ramp the system to 1000°C in < 30minutes and up to a maximum of 1100°C.

Features and capabilities include up to three digital flow-meter input gas lines, residual oxygen levels: < 5ppm, low power consumption: <1,2kW at 1000°C, a Windows (XP/7) based process recipe generation and management system: 100steps per recipe, Step length 1s - 99:59min, process data logging, several user levels, Barcode management and a PLC Controller.

The systems are ideal for research and development or low volume production, including wet and dry oxidation with/without P&N type source diffusion, annealing under inert/noble gas or vacuum for e.g. polyimide/BCB baking and thick film/glass paste firing etc., or for multiple processes without cross contamination by ATV's easily replaceable quartz in-liner system.

The system features include:

  • Proven ATV quality, components and reliability
  • Small Footprint Table-top Systems
  • Chamber size: 114mmØ, 255mm depth, approx. 2,6l
  • 1100 °C maximum operating temperature
  • Heating/cooling rates down to 1K/100min
  • Oxygen < 5ppm with 2 times vacuum-N2-backfill routine
  • Up to 100 process steps per reflow profile
  • Unlimited Process Recipes
  • Optional through wall installation possible
  • Maximum three input gas lines with digital flow-meters

FURTHER INFORMATION & REQUEST FORM:

Contact Us

Tel: +44 (0)1264 334505

Email: enquiries@inseto.co.uk

Applications

Wet Oxidation, Dry Oxidation, P Type Diffusion, N Type Diffusion, Annealing, Polyimide Curing, Vacuum Baking, Thick Film Firing, Glass Paste Firing

Industry Segments

Universities, Research Development, Semiconductor Production, Medical, Photonics, LTCC, Solar Cell, Photo Voltaic, Compound Fabrication etc.

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United Kingdom, Ireland & Scandinavia/Nordic Regions: Finland, Sweden, Norway & Denmark

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Telephone:
+44 (0)1264 334505

Email:
enquiries@inseto.co.uk

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